| Abstract: | Development of a two‐dimensional (2D) micropowder blasting simulator for microfabrication of a glass substrate with a patterned polymer mask is reported. In order to investigate the effect of mask erosion on a processed glass profile, a cellular automaton simulation in which erosion of the glass and the polymer mask were taken into account was applied to the micropowder blasting process for the first time. From a comparison of the simulation result with the processed glass profile in the experiment, it was demonstrated that the processed glass profile with the mask erosion could be simulated using our simulator. Furthermore, it was confirmed that the processed profile in the glass depended on the mask profile and the ratio of the deformation wear and the cutting wear of a mask. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. |
