| 真空管道TiN膜热出气率实验研究 |
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| 引用本文： | 王勇,张耀锋,尉伟,范乐,王建平,耿会平.真空管道TiN膜热出气率实验研究[J].真空,2007,44(4):59-61. |
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| 作者姓名： | 王勇 张耀锋 尉伟 范乐 王建平 耿会平 |
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| 作者单位： | 中国科学技术大学,国家同步辐射实验室,安徽,合肥,230029 |
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| 摘 要： | 简要叙述了小孔流量法测量材料出气率实验的原理和实验装置，给出了不锈钢溅射镀TiN膜在不同情况下的热出气率，并对影响不锈钢溅射镀TiN膜热出气率情况的各种因素进行了分析，为使用溅射镀TiN膜表面处理的储存环真空室的设计提供了依据。
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| 关 键 词： | 热出气率 TiN膜 真空材料 表面处理 |
| 文章编号： | 1002-0322（2007）04-0059-03 |
| 修稿时间： | 2007-01-08 |
Thermal outgassing rate of the vacuum pipe's TiN coating |
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| WANG Yong,ZHANG Yao-feng,WEI Wei,FAN Le,WANG Jian-ping,GENG Hui-ping.Thermal outgassing rate of the vacuum pipe''''s TiN coating[J].Vacuum,2007,44(4):59-61. |
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| Authors: | WANG Yong ZHANG Yao-feng WEI Wei FAN Le WANG Jian-ping GENG Hui-ping |
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| Affiliation: | National Synchrotron Radiation Laboratory, University of Sciend and Technology of China, Hefei 230029, China |
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| Abstract: | Describes briefly the working principle and experimental setup of measuring the thermal outgassing rate by orifice throughput method. Then, the thermal outgassing rates of stainless steel during TiN coating sputtering under different conditions are given, and various influencing factors on the outgassing rates are analyzed. The results can provide some experimental basis for the design of the vacuum chambers of storage ring. |
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| Keywords: | thermal-outgassing rate TiN coating vacuum material surface treatment |
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