基于自适应模拟退火算法的薄膜特性参数计算方法研究

提出了根据测量得到的待测薄膜的透射率数据,采用全局优化算法—自适应模拟退火算法结合共轭梯度算法求解薄膜的光学特性参数。并对T a2O5单层薄膜的厚度及折射率进行测量计算。实验结果表明,计算得到的光学特性参数值与实测结果相一致,厚度误差小于3nm,在540nm处折射率误差小于0.02。该方法具有操作简单、无损测量、计算速度快、精度高等优点,具有相当的实用性。

Thin film optical parameters determination using adaptive simulated annealing algorithm

This paper introduces a new method to determine the optical parameters of thin films using adaptive simulated annealing(ASA) algorithm and conjugate gradient(CG)algorithm.Based on the theory of thin film calculating,it uses the transmission tata through thin film over a range of wavelengths to calculate the optical parameters of thin film.The thickness and refractive index of a single layer Ta_2O_5 film is measured as an example.The experimental results show the calculated transmittance of the film is consistent with the measured value.The thickness error between different measurements is less than 3nm and the refractive index error at 540nm is less than 0.02.This method has the advantage of easy to operate,without hurt to the sample,with fast speed and high precision.