| 场发射电子显微镜实验室设计 |
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| 引用本文： | 闫允杰,唐国翌,郑大力.场发射电子显微镜实验室设计[J].电子显微学报,2000,19(5):728-734. |
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| 作者姓名： | 闫允杰 唐国翌 郑大力 |
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| 作者单位： | 1. 清华大学材料学院电镜室,北京,100084
2. 北京钢铁研究总院,北京,100081 |
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| 摘 要： | 场发射电子显微镜是新型超高精密的设备，其对机房安装环境有特殊要求。为保证这种电子显微镜获得高分辨率图像，必须严格控制震动和环境磁场的干扰。本文对场发射电子显微镜实验室的防磁、防震和接地等问题进行分析，通过实际施工后的现场检测证实本设计满足了场发射电镜室对环境的技术要求，保证了我校两台场发射电镜顺利安装验收。
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| 关 键 词： | 隔震 磁屏蔽 场发射电子显微镜 设计 |
The design for field emission electron microscope (FEEM) laboratory |
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| YAN Yun-jie,TANG Guo-yi,ZHENG Da-li.The design for field emission electron microscope (FEEM) laboratory[J].Journal of Chinese Electron Microscopy Society,2000,19(5):728-734. |
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| Authors: | YAN Yun-jie TANG Guo-yi ZHENG Da-li |
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| Affiliation: | YAN Yun-jie 1 TANG Guo-yi 1 ZHENG Da-li 2 |
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| Abstract: | FEEM is a kind of ultrahigh-resolution and high sensitivity equipment that has special requirement to its installation room where it is to installed. Vibration and the effect of external magnetic field must be strictly controlled so as to ensure the high resolution of images obtained from the microscope. Anti magnetic and shockproof requirements and ground connection of the FEEM Laborator y have been discussed in details. Results of the test on the laboratory have prov ed that the installation requirement of FEEM has been satisfied and has ensured two FEEM to be installed and accepted in Tsinghua University. |
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| Keywords: | field emission electron microscope (FEEM) shockproof(isolated foundation) an timagnetic(magnetic shield) |
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