| 采用钛-铝-钼过渡层在铜基底上沉积金刚石薄膜的研究 |
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| 引用本文： | 程春晓,姚宁,马丙现,杨仕娥,赵永梅,张兵临. 采用钛-铝-钼过渡层在铜基底上沉积金刚石薄膜的研究[J]. 真空与低温, 2005, 11(1): 46-49 |
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| 作者姓名： | 程春晓 姚宁 马丙现 杨仕娥 赵永梅 张兵临 |
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| 作者单位： | 郑州大学,材料物理教育部重点实验室,河南,郑州,450052 |
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| 摘 要： | 采用钛-铝-钼过渡层研究了铜基片上金刚石薄膜的化学气相沉积.用SEM和Raman谱研究了薄膜的形貌和质量.用XRD分析了膜基间形成的化合物的成分,并进一步分析了铝的存在对膜基结合力的影响.实验证明,钛-铝-钼过渡层的存在显著提高了金刚石薄膜与铜基底的结合力.
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| 关 键 词： | 金刚石薄膜 化学气相沉积 铜基底 过渡层 |
| 文章编号： | 1006-7086(2005)01-0046-04 |
| 修稿时间： | 2004-08-30 |
DIAMOND FILMS DEPOSITED ON COPPER SUBSTRATE WITH Ti-Al-Mo INTERMEDIATE LAYER |
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| CHENG Chun-xiao,YAO Ning,MA Bing-xian,YANG Shi-e,ZHAO Yong-mei,ZHANG Bing-lin. DIAMOND FILMS DEPOSITED ON COPPER SUBSTRATE WITH Ti-Al-Mo INTERMEDIATE LAYER[J]. Vacuum and Cryogenics, 2005, 11(1): 46-49 |
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| Authors: | CHENG Chun-xiao YAO Ning MA Bing-xian YANG Shi-e ZHAO Yong-mei ZHANG Bing-lin |
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| Abstract: | The chemical vapor deposition of dia mond films on copper substrates with Ti -Al -Mo intermediate layer was studied.Scanning electron microsc opy and Raman spectroscopy were used to analyze the films.The component o f composites formed in the interface of the films a nd substrate was examined by XRD.The effect on the adhesion due to the exis tence of Al film was further studied.It showed t hat the adhesion of the diamond films on the copper substrate could be greatly improved. |
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| Keywords: | diamond films chemical vapor deposition copper substrate intermedi ate layer |
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