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Directed fracture for the fabrication of free-standing multilayered submicrometer structures |
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| Authors: | Robaina Roberto R López-Martínez María José Esteve Jaume Perez-Castillejos Raquel Plaza José Antonio |
| Affiliation: | Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Cerdanyola, Barcelona, Spain. |
| Abstract: | |
| Keywords: | fracture mechanical properties microdevices multilayers nanostructures |
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