基于肖特基二极管的太赫兹功率探头研究

目前的太赫兹功率探头主要采用热敏电阻和热电偶作为功率检测器件，测量速度较慢。肖特基二极管具有较快的检波速度，但是在太赫兹频段检波灵敏度降低，功率检测实现的难度很大，本文对基于肖特基二极管的太赫兹功率探头设计技术进行研究，采用双平衡检波、渐变波导匹配、小信号斩波放大、温度补偿等技术，实现了肖特基二极管在太赫兹频段的高灵敏度、高稳定性功率检测，试验结果表明：0.11THz~0.325THz 频段端口驻波比优于1.35，灵敏度优于-40dBm。

Research on THz Power Sensor of Schottky Diode

The current THz power sensors mainly take thermal resistor and thermal couple, which have very low test speed,as power detection device. The Schottky diode has fast detection speed, but its detection sensitivity will decrease in THz bandwhich makes it difficult to realize the power detection. This paper will study on the design of THz power sensor based onSchottky diode. It takes dual-balance detector, tapered waveguide match, small signal chopping and amplification and temperaturecompensation technique to realize the high sensitivity and high power detection stability of Schottky diode in THz band. Theresults prove that the VSWR at the port is better than 1.35 at the frequency of 0.11THz~0.325THz and the sensitivity is better than-40dBm