| 直接感光法制备锆钛酸铅镧薄膜图形及其性能 |
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| 引用本文： | 张卫华,石春梅,袁媛,赵高扬,盛淑月. 直接感光法制备锆钛酸铅镧薄膜图形及其性能[J]. 半导体学报, 2008, 29(6): 1189-1193 |
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| 作者姓名： | 张卫华 石春梅 袁媛 赵高扬 盛淑月 |
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| 作者单位： | 西安理工大学材料科学与工程学院,西安,710048;西安理工大学材料科学与工程学院,西安,710048;西安理工大学材料科学与工程学院,西安,710048;西安理工大学材料科学与工程学院,西安,710048;西安理工大学材料科学与工程学院,西安,710048 |
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| 基金项目： | 陕西省自然科学基金 , 西安应用材料锄新基金 , 陕西省电工材料与溶(浸)渗技术重点实验室基金 |
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| 摘 要： | 采用化学修饰溶胶凝胶工艺,以PVP为薄膜开裂抑制剂,以苯酰丙酮为化学修饰剂,利用其与金属盐形成的配位螫合物结构,合成了具有紫外光感应特性的锆钛酸铅镧(Pb0.91La0.09(Zr0.65Ti0.35)O3,PLZT)前驱溶胶;对单次提拉得到的凝胶薄膜进行直接感光法图形制备;通过后续热处理,在Pt/TiO2/SiO2/Si衬底上得到了具有钙钛矿结构的PLZT薄膜图形,其最终热处理后的膜厚约为260nm,剩余极化强度约为6.7μC/cm2,矫顽场强约为77kV/cm,相对介电常数约为356,介电损耗约为0.02,漏电流密度小于10-2μA/cm2,极化疲劳特性可达107以上.
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| 关 键 词： | 锆钛酸铅镧薄膜 溶胶凝胶 微细图形 感光性 |
Pattern Fabrication on PLZT Films and Their Properties by a Direct Patterning Process |
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| Zhang Weihu,Shi Chunmei,Yuan Yuan,Zhao Gaoyang and Sheng Shuyue. Pattern Fabrication on PLZT Films and Their Properties by a Direct Patterning Process[J]. Chinese Journal of Semiconductors, 2008, 29(6): 1189-1193 |
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| Authors: | Zhang Weihu Shi Chunmei Yuan Yuan Zhao Gaoyang Sheng Shuyue |
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| Affiliation: | School of Materials Science & Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Materials Science & Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Materials Science & Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Materials Science & Engineering, Xi'an University of Technology, Xi'an 710048, China;School of Materials Science & Engineering, Xi'an University of Technology, Xi'an 710048, China |
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| Abstract: | The photosensitive Pb0.91La0.09(Zr0.65Ti0.35)O3(PLZT)precursor sols are prepared by a modified sol-gel process with benzoylacetone as chemical modification to form a coordination chelate structure of metal-salt with PVP as an addition agent for suppressing film cracks.The patterns of PLZT gel films are prepared by direct patterning process and single dip-coating,and the PLZT film patterns with perovskite structure on Pt/TiO2/SiO2/Si substrate are obtained after heat-treatment.The PLZT film's pattern thickne... |
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| Keywords: | PLZT films sol-gel fine-patterning photosensitivity |
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