| 退火处理对氧化锌透明导电薄膜的结构及电学性能的影响 |
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| 引用本文： | 马瑾,计峰,马洪磊. 退火处理对氧化锌透明导电薄膜的结构及电学性能的影响[J]. 信息技术与信息化, 1997, 0(2) |
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| 作者姓名： | 马瑾 计峰 马洪磊 |
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| 作者单位： | 山东大学光电材料与器件研究所 |
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| 摘 要： | 采用真空蒸发技术，以醋酸锌和氯化铝作为蒸发物质，在加热的玻璃衬底上制备出氧化锌和铝掺杂的氧化锌透明导电薄膜。研究了氢气、空气和真空退火处理对制备薄膜的结构及电学性能的影响。
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| 关 键 词： | 氧化锌，退火，电阻率 |
Structure and Electrical Properties of ZincOxide Films Affected by Heat Treatment |
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| Ma Jin Ji Feng Ma Honglei. Structure and Electrical Properties of ZincOxide Films Affected by Heat Treatment[J]. Information Technology & Informatization, 1997, 0(2) |
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| Authors: | Ma Jin Ji Feng Ma Honglei |
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| Affiliation: | Ma Jin Ji Feng Ma Honglei |
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| Abstract: | Un-doped and aluminium-doped zinc oxide films were prepared by evaporation of zinc acetate and aluminium chloride onto heated glass substrate. The structure and electrical properties of the films offected by heat treatment in hydrugen gas, air and vacuum were studied. |
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| Keywords: | Zinc oxide Heat treatment Resistivity |
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