| 使用SPM的纳米级加工技术新进展 |
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| 引用本文： | 袁哲俊.使用SPM的纳米级加工技术新进展[J].纳米技术与精密工程,2004,2(1):45-49. |
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| 作者姓名： | 袁哲俊 |
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| 作者单位： | 哈尔滨工业大学机电工程学院,哈尔滨,150001 |
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| 摘 要： | 扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵，该文介绍了用STM和AFM进行纳米级加工的各种最新方法：针尖直接雕刻，针尖光刻加工，局部阳极氧化，原子沉积形成纳米点，原子去除形成沟槽微结构，多针尖加工，原子自组装形成三维结构等．使用SPM的纳米级加工对发展微型机械、纳米电子学和微机电系统具有重要意义．
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| 关 键 词： | 扫描探针显微镜 纳米级加工 原子操纵 SPM 超精密加工 |
| 文章编号： | 1672-6030(2004)01-0045-05 |
| 修稿时间： | 2003年5月20日 |
Advances in Nano-Machining by Using SPM |
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| YUAN Zhe,jun.Advances in Nano-Machining by Using SPM[J].Nanotechnology and Precision Engineering,2004,2(1):45-49. |
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| Authors: | YUAN Zhe jun |
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| Abstract: | Scanning probe microscope(SPM) is used not only for measuring the micro profiles of surfaces, but also for nano ultraprecise machining and atom manipulation now. Various new methods of nano machining using scanning tunneling microscope and atomic force microscope, including direct stylus graving, stylus lithography, local anode oxidation, nano point formation by atom deposition, micro grooves formation by atom removal, multi stylus machining and 3 D structure formation by atom self assembly etc. are presented in this paper. Nano machining using SPM has significant importance in the development of micro mechanisms, nano electronics and micro electromechanical systems. |
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| Keywords: | scanning probe microscope nano-machining atom manipulation |
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