Phase change and cooling characteristics of microjets measured using microcantilever heaters |
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| Authors: | Jungchul Hanif Ari William P. |
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| Affiliation: | aDepartment of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United States;bWoodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States |
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| Abstract: | This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 μm. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9–7.6 kW/cm2 for heater temperatures of 25–350 °C. Overall, the techniques reported herein show promise for characterizing microscale jet flows. |
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| Keywords: | Anemometer Boiling hysteresis Critical heat flux Microcantilever Microjets |
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