用于液晶显示器的低温多晶硅玻璃基板的研究现状及发展趋势

目前,电子信息产品应用广泛,液晶显示器是电子产品的必备元件。低温多晶硅薄膜晶体管液晶显示器(LTPS TFT-LCD)因具有解析度高、响应速度快、能耗低、画质高、性能高等优势而成为继非晶硅之后的新一代有源矩阵液晶显示器。由于LTPS高温制程要求玻璃基板具有较高的应变点和软化点,对玻璃的实际生产提出较大挑战。目前LTPS玻璃基板市场集中度很高,技术基本被国外厂商垄断。因此,开发具有自主知识产权的LTPS玻璃基板具有突破性的意义。 本文详细介绍了LTPS TFT-LCD用玻璃基板的组成、性能及制备方法,指出了玻璃基板制备的工艺难点。归纳了玻璃基板的国内外研究现状,分析了玻璃基板的发展趋势及应用前景,为我国自主研发生产LTPS TFT-LCD用玻璃基板提供参考。

Research Status and Development Trend of Low Temperature Polycrystalline Silicon Glass Substrates for Liquid Crystal Displays

Electronic information products are widely used at present, the liquid crystal display is the essential element of electronic products. Low-temperature polycrystalline silicon thin film transistor liquid crystal display (LTPS TFT-LCD) with high resolution, fast response speed, low energy consumption, high quality and high performance has become a new generation of active matrix liquid crystal display. The high temperature process of LTPS require that glass substrate has higher strain point and softening point, this is the challenge for the actual production of the glass. The LTPS glass technology basically monopolized by foreign ma-nufacturers. Therefore, the development of LTPS glass substrate with independent intellectual property rights is of great significance. This review introduces composition, properties and preparation methods of glass substrate for the LTPS TFT-LCD, and offers the difficulty of preparation technology. In addition, this paper summarizes the research status at home and abroad of LTPS glass substrate, analyzes the development trend and application prospect of LTPS glass substrate, provides the reference in independent research and development production of LTPS TFT-LCD glass substrate for our country.