Effects of substrate size on properties of carbon coatings on glass cylinder substrates prepared by thermal chemical vapor deposition |
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Authors: | Po-Yu Chen Hung-Yi Lin |
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Affiliation: | a Department of Materials Science and Engineering, National Chung Hsing University, 250 Kuo Kuang Road, Taichung 402, Taiwan b Mechanical and Systems Research Laboratories, Industrial Technology Research Institute, Hsinchu 310, Taiwan |
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Abstract: | The effect of the substrate size on the properties of carbon coatings that are deposited on the glass cylinder substrates by thermal chemical vapor deposition is investigated. Experimental results show that the deposition rate of carbon coatings decreases as the diameter of the glass cylinder increases, because the residence time of the precursor gas in the deposition zone decreases and the deposition area of the substrate increases. Experimental results also reveal that the surface roughness and electrical resistivity of carbon coatings decrease as the diameter of the glass cylinder increases, while the degree of ordering and crystallite size of the carbon coatings increase. |
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Keywords: | Carbon coating Thermal chemical vapor deposition Raman spectra Surface roughness Optical fiber |
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