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Low temperature ordering of FePt films by in-situ heating deposition plus post deposition annealing |
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| Authors: | YS Yu Hai-Bo Li Mei Liu WD Fei DJ Sellmyer |
| Affiliation: | a School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, PR China b College of Physics, Jilin Normal University, Siping 136000, PR China c Department of Physics and Astronomy and Nebraska Center for Materials and Nanoscience, University of Nebraska, Lincoln, Nebraska 68588, USA |
| Abstract: | FePt thin films with 40 nm thickness were prepared on thermally oxidized Si (001) substrates by dc magnetron sputtering at the nominal growth temperature 375 °C. The effects of annealing on microstructure and magnetic properties of FePt thin films were investigated. The as-deposited FePt thin films show soft magnetic properties. After the as-deposited FePt thin films were annealed at various temperatures and furnace cooled, it is found that the ordering temperature of L10 FePt phase could be reduced to 350 °C. For FePt thin films annealed at 350 °C, the in-plane and out-of-plane coercivities of the films increased to 510 and 543 kA/m, respectively, and the films had hard magnetic properties. A highly (001) orientation was obtained, when FePt thin films were annealed at 600 °C. And the hysteresis loops of FePt thin films annealed at 600 °C show out-of-plane magnetic anisotropy. |
| Keywords: | FePt Magnetic films Low temperature ordering Coercivity Sputtering Annealing |
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