Effect of bottom electrodes on dielectric properties of high frequency Ba0.5Sr0.5TiO3 parallel plate varactor |
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| Authors: | Su Sheng Xiao-Yu Zhang Peng Wang CK Ong |
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| Affiliation: | Centre for Superconducting and Magnetic Materials, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore,117542, Singapore |
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| Abstract: | Three types of Ba0.5Sr0.5TiO3 (BST) thin film parallel plate varactor with different bottom electrodes were fabricated. The bottom electrodes of three types of varactor were perovskite conducting oxide La0.7Sr0.3MnO3 (LSMO), Pt and Au, respectively. Dielectric properties of the BST thin films were characterized in the frequency range from 10 MHz to 15 GHz. The microstructure of the BST thin films was investigated by X-ray diffraction and scanning electron microscope. The microstructural analysis shows that the BST thin films grown on LSMO and Pt bottom electrodes are polycrystalline textured with columnar grains. Dielectric measurement indicates that the BST thin film grown on LSMO bottom electrode has a maximum dielectric constant and a little higher loss tangent. |
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| Keywords: | Barium strontium titanate Thin films Parallel plate varactor Dielectric properties Microwave measurements X-ray diffraction Pulse laser deposition |
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