Effect of substrate temperatures on the optical properties of evaporated Sc2O3 thin films |
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| Authors: | Guanghui Liu Yunxia Jin Hongbo He Zhengxiu Fan |
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| Affiliation: | Key Laboratory of Materials for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, PR China |
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| Abstract: | Scandium oxide (Sc2O3) films were deposited by electron beam evaporation with substrate temperatures varying from 50 to 350 °C. X-ray diffraction, scanning electron microscopy, spectrometer, and optical profilograph were employed to investigate the structural and optical properties of the films. The refractive index and extinction coefficient were calculated from the transmittance and reflectance spectra, and then the energy band gaps were deduced and discussed. Laser induced damage threshold of the films were also characterized. Optical and structural properties of Sc2O3 films were found to be sensitive to substrate temperature. |
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| Keywords: | Substrate temperature Optical properties Scandium oxide Thin films Refractive index Energy band gaps X-ray diffraction |
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