| In_xGa_(1-x)As/GaAs应变超晶格的X射线双晶衍射研究 |
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| 引用本文： | 陈京一,朱南昌,田亮光,李润身.In_xGa_(1-x)As/GaAs应变超晶格的X射线双晶衍射研究[J].半导体学报,1990,11(11):855-858. |
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| 作者姓名： | 陈京一 朱南昌 田亮光 李润身 |
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| 作者单位： | 中国科学院上海冶金研究所 上海
(陈京一，朱南昌，田亮光)，中国科学院上海冶金研究所 上海(李润身) |
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| 摘 要： | 本文阐述了一种基于X射线动力学衍射理论的计算机模拟方法,该方法可用于分析超晶格材料的X射线双晶摆动曲线,用模拟计算方法得到了In_xGa_(1-x)As/GaAs应变超晶格的各种结构参数。
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| 关 键 词： | InGaAs／GaAs 超晶格 双晶衍射 |
X-Ray Double-Crystal Diffraction Study of In_xGa_(1-x)As/GaAs Strained-Layer Superlattice |
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| Chen Jingyi/.X-Ray Double-Crystal Diffraction Study of In_xGa_(1-x)As/GaAs Strained-Layer Superlattice[J].Chinese Journal of Semiconductors,1990,11(11):855-858. |
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| Authors: | Chen Jingyi/ |
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| Affiliation: | Chen Jingyi/Shanghai Institute of Metallury,Academia Sinica Shanghai,200050,ChinaZhu Nanchang/Shanghai Institute of Metallury,Academia Sinica Shanghai,200050,ChinaTian Liangguang/Shanghai Institute of Metallury,Academia Sinica Shanghai,200050,ChinaLi Runshen/Shanghai Institute of Metallury,Academia Sinica Shanghai,200050,China |
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| Abstract: | A computer simulation method based on X-ray dynamical diffraction theory is presented.The method is used for the analysis of X-ray double-crystal rocking curves of superlattices,The structure parameters of the In_xGa_(1-x)As/GaAs strained-layer superlattice is obtained fromthe simulation of the rocking-curve. |
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| Keywords: | Strained-layer superlattice Double-crystal diffraction Dynamical diffraction theory Computer simulation Rocking curve Structure parameters |
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