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多晶硅生产中氯化氢吸收塔的模拟研究
引用本文:冯泽民,田先瑞.多晶硅生产中氯化氢吸收塔的模拟研究[J].青岛科技大学学报,2013(2):147-151.
作者姓名:冯泽民  田先瑞
作者单位:大全新能源有限公司
摘    要:采用PRO/II模拟软件,选用PRM方程,对多晶硅生产过程中氯化氢吸收塔进行了模拟研究。结果表明,在操作压力为1.5MPaG(相对压力)、吸收剂温度为-40℃、理论塔板数为24块时,选择合适的氯硅烷吸收剂用量可对尾气中的HCl实现良好的吸收。

关 键 词:多晶硅  PRO/II模拟软件  氯化氢  生产工艺

Simulation Study on the Hydrogen Chloride Absorption Column in the Polysilicon Production Process
FENG Ze-min,TIAN Xian-rui.Simulation Study on the Hydrogen Chloride Absorption Column in the Polysilicon Production Process[J].Journal of Qingdao University of Science and Technology:Natutral Science Edition,2013(2):147-151.
Authors:FENG Ze-min  TIAN Xian-rui
Affiliation:(Daqo New Energy Co.,LTD.,Chongqing 404020,China)
Abstract:This paper simulates the HCl adsorption column in the polysilicon production process with the software PRO/II and selecting PRM formula as the calculation method.The results showed that when the states of tower was 24,the operation pressure of adsorption column was 1.5MPaG(relative pressure) and the temperature of adsorbents was-40 ℃,HCl can be adsorbed completely by chlorosilane.
Keywords:polysilicon  simulation software PRO/II  hydrochloric acid  process technology
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