无氟MOD法制备DyBa2Cu3O7-x膜的高温热处理过程研究

采用无氟金属有机物沉积法(MOD)在(00l)取向的LaAlO3单晶基底上制备出DyBa2Cu3O7-x(DyBCO)超导薄膜。由于采用了无氟金属有机物体系,分解过程中避免了采用传统的三氟醋酸盐时有害气体的产生。SEM分析表明,成相过程中增加高温热处理过程,可以明显提高外延生长薄膜的质量。X射线衍射(XRD)分析及φ扫描的结果表明,经过高温处理的DyBCO薄膜具有良好的面内外织构。本研究制备的DyBCO薄膜的超导转变温度达92K,77K自场下的临界电流密度达到1.8MA/cm2。

High Temperature Treatment of DyBa2Cu3O7-x Thin Film Prepared by F-Free Metal Organic Deposition Method

Epitaxial DyBa_2Cu3_O_(7-x)(DyBCO) superconductive thin film was fabricated via a F-free metal organic deposition (MOD) method on the (00l) single crystal substrate of LaAlO_3. Because of the fluorine-free metal organic system, harmful gas by the normal TFA-MOD approach was avoided during the heat treatment. A high temperature treatment was introduced during the growth of DyBCO film and then the SEM observation shows denser microstructure and better texture of the film. X-ray diffraction pattern reveals the c-axis oriented grains. φ-scan also shows an excellent in-plane texture in the DyBCO film with a high temperature treatment. The DyBCO film fabricated by F-free MOD with a high temperature treatment has a superconductivity transition temperature of 92 K and a critical current density of 1.8 MA/cm~2 at 77 K in self-field .