| RF MEMS在微波器件中的小型化应用 |
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| 引用本文： | 刘俭成,杜蕊. RF MEMS在微波器件中的小型化应用[J]. 计算机与网络, 2012, 0(13): 63-65 |
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| 作者姓名： | 刘俭成 杜蕊 |
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| 作者单位： | [1]中国电子科技集团公司第五十四研究所,河北石家庄050081 [2]石家庄信息工程职业学院,河北石家庄050035 |
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| 摘 要： | 文章首先阐述了微电子机械系统(MEMS)技术的基本概念、工艺流程及发展概况;其次,介绍了RF MEMS技术在射频系统中的应用及RF MEMS器件在功耗、体积、质量、性能和成本上的优势;最后重点介绍了RF MEMS技术应用,包括RF MEMS开关、移相器、谐振器和滤波器等典型微波元器件,分析其结构特征、发展现状和相对于传统器件的性能优势,在此基础上展望RF MEMS技术应用前景。
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| 关 键 词： | RF MEMS 小型化应用 |
Miniaturization Application of RF MEMS Technology in MW Device |
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| LIU Jian-cheng,DU Rui. Miniaturization Application of RF MEMS Technology in MW Device[J]. China Computer & Network, 2012, 0(13): 63-65 |
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| Authors: | LIU Jian-cheng DU Rui |
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| Affiliation: | 1 The 54th Research Institute of CETC, Shijiazhuang Hebei 050081, China) (2 Shijiazhuang Information Engineering Vocational College, Shijiazhuang Hebei 050035, China) |
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| Abstract: | The basic concept, technological flow and development situation of micro-electro-mechanical systems （MEMS） technology are described firstly. The application of RF-MEMS technology in RF fields and the advantages of RF MEMS device in power consumption, volume, weight, RF capabilities and cost are mainly presented secondly. Finally, the application of RF-MEMS devices is introduced, including RF MEMS switch, phase shifter, resonator and filter. Their structural feature, development status and advantages compared to the traditional device are analyzed. Based on the analysis, the application prospect of RF MEMS technology is described. |
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| Keywords: | RF MEMS miniaturization application |
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