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基于表面响应法的半导体器件热阻网络技术研究
引用本文:曾理,丁晓鸿,杨邦朝,蒋明,陈文媛,谢诗文,滕林.基于表面响应法的半导体器件热阻网络技术研究[J].微电子学,2007,37(2):155-159.
作者姓名:曾理  丁晓鸿  杨邦朝  蒋明  陈文媛  谢诗文  滕林
作者单位:1. 电子科技大学,微电子与固体电子学院,四川,成都,610054
2. 深圳振华富电子有限公司,广东,深圳,518109
摘    要:热阻网络是在扩展传统内热阻定义的基础上,将计算机模拟的全模型采用优化方法简化而得到的。该方法继承了全模型可预测在各种工作环境下的芯片结温的优点。在分析半导体器件内热阻的基础上,提出了一种新的独立于边界条件的热阻网络模型,并运用表面响应法,建立VCM(Valid Chip Model)的热阻网络模型。通过验证,该模型具有很高的精确度,适用于复杂的系统级热设计。

关 键 词:半导体器件  热阻网络  表面响应法  独立边界条件
文章编号:1004-3365(2007)02-0155-05
修稿时间:2006-09-052006-11-16

Thermal Resistance Network Technology for Electronic Device Based on Response Surface Optimization Method
ZENG Li,DING Xiao-hong,YANG Bang-chao,JIANG Ming,CHEN Wen-yuan,XIE Shi-wen,TENG Lin.Thermal Resistance Network Technology for Electronic Device Based on Response Surface Optimization Method[J].Microelectronics,2007,37(2):155-159.
Authors:ZENG Li  DING Xiao-hong  YANG Bang-chao  JIANG Ming  CHEN Wen-yuan  XIE Shi-wen  TENG Lin
Abstract:Thermal resistance network based on expanded traditional thermal resistance was obtained from detailed numerical simulation,which was capable of predicting chip temperature in any thermal environment.This presentation offers a further expanded inner thermal resistance methodology and proposes a novel thermal resistance network independent of validated boundary conditions.The response surface optimization method was used to found a thermal resistance network of the Valid Chip Model(VCM).It was found that the new thermal resistance network is of high accuracy and more robust and valid in thermal design of complicated systems.
Keywords:Semiconductor device  Thermal resistance network  Response surface method  Boundary condition independence
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