Novel plasma treatment in linear antenna microwave PECVD system |
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Authors: | Neda Neykova Halyna KozakMartin Ledinsky Alexander Kromka |
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Affiliation: | a Institute of Physics, Academy of Sciences of the Czech Republic, v.v.i., Cukrovarnicka 10, 162 53 Prague 6, Czech Republic b Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering, Trojanova 13, 120 00 Prague 2, Czech Republic |
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Abstract: | This work reports on hydrogen termination of nano-crystalline diamond films and the behavior of polymer SU-8 as passivating layer after plasma treatment performed at low temperature in a novel linear antenna microwave plasma enhanced system. Nano-crystalline diamond films were grown by microwave plasma enhanced chemical vapor deposition and then hydrogen terminated at different substrate temperatures. The results indicate that a temperature as low as 200 °C is sufficient to reliably attain a diamond surface conductivity of the order of 10−7 (Ω/□)−1. An increase in substrate temperature up to 400 °C results in an increase in surface conductivity up to 1.7 × 10−6 (Ω/□)−1. The structural changes of the SU-8 passivating layer, before and after plasma treatment, were investigated by FTIR spectroscopy. |
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Keywords: | Nano-crystalline diamond Low temperature hydrogen termination Surface conductivity FTIR SU-8 |
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