Novel plasma treatment in linear antenna microwave PECVD system

This work reports on hydrogen termination of nano-crystalline diamond films and the behavior of polymer SU-8 as passivating layer after plasma treatment performed at low temperature in a novel linear antenna microwave plasma enhanced system. Nano-crystalline diamond films were grown by microwave plasma enhanced chemical vapor deposition and then hydrogen terminated at different substrate temperatures. The results indicate that a temperature as low as 200 °C is sufficient to reliably attain a diamond surface conductivity of the order of 10⁻⁷ (Ω/□)⁻¹. An increase in substrate temperature up to 400 °C results in an increase in surface conductivity up to 1.7 × 10⁻⁶ (Ω/□)⁻¹. The structural changes of the SU-8 passivating layer, before and after plasma treatment, were investigated by FTIR spectroscopy.