Affiliation: | a Department of Microelectronics, FEI STU in Bratislava, Ilkovi?ova 3, 812 19 Bratislava, Slovak Republic b Department of Technologies and Materials, FME TU of Košice, Mäsiarska 74, 040 01 Košice, Slovak Republic c International Laser Center, Ilkovi?ova 3, 841 04 Bratislava 4, Slovak Republic |