一种激光散斑法实时测量表面粗糙度的新方法

本文根据激光散斑相干性原理与理论,提出了用双达夫棱镜产生两束间距和夹角连续可调的平面光波同时照射粗糙表面,由1-D CCD采集散射光场的相干度信号,经过计算机对对比度的处理,能实时测量物体表面粗糙度的新方法。结果表明,该方法较现行测试法提高了判读精度,扩大了测量范围。

A new techuique for determining surface roughness in real-time by laser speckle

A new method for determining surface roughness in realtime is proposed in this paper,based on the processing of laser interference spackle.The measurement system includes a He-Ne laser source,a double Dove prism,a laser interferometer,a CCD detector and a data processing device.A rough surface is illuminated by two laser beams which are obtained with the Dave prism,interference spackle of the reflective laser beams from the rough surface can be acquired in CCD detector surface.With the data processing device,the surface roughness can be automatically determined.The experimental results show that the method is superior to other methods in measurement accuracy and range.