| MEMS微型气相色谱分离柱结构的研究进展 |
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| 引用本文： | 王力,杜晓松,胡佳,蒋亚东. MEMS微型气相色谱分离柱结构的研究进展[J]. 微纳电子技术, 2011, 0(10): 639-647 |
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| 作者姓名： | 王力 杜晓松 胡佳 蒋亚东 |
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| 作者单位： | 电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室 |
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| 基金项目： | 国家自然科学基金项目(60736005,60871050) |
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| 摘 要： | 气相色谱分离柱是色谱系统的重要组件之一,采用MEMS技术制作的微型气相色谱分离柱与传统分离柱相比,因其具有较小的平面二维结构和快速分离混合物的能力而备受青睐。对MEMS微型气相色谱分离柱结构的研究进展进行了综述,将硅基底材料制作的分离柱结构分为螺旋型、直线型、蛇型和阵列型,重点从组分分离时间、分辨率和理论热塔板数等方面对微型色谱分离柱的各种结构进行了综合分析和比较,并介绍了新兴工艺制作的镍基底、聚合物基底和PECVD薄膜基底的微型气相色谱分离柱。
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| 关 键 词： | 气相色谱 分离柱 微电子机械系统(MEMS) 气体传感器 保留时间 |
Research Progress of Structures for MEMS Gas Chromatography Columns |
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| Affiliation: | Wang Li,Du Xiaosong,Hu Jia,Jiang Yadong (State Key Laboratory of Electronic Thin Films and Integrated Devices,School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China) |
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| Abstract: | Gas chromatography column is one of the important components for chromatographic systems.Compared with the conventional separation columns,the MEMS gas chromatography columns are more favourite,due to its smaller two-dimensional structure and the ability for fast separation.The structures of the MEMS gas chromatography columns are systematically summarized,and the separation columns made by silicon substrates are divided into the spiral,linear,snake and array types.Various structures of the gas chromatography column are synthetically analyzed and compared from the performance of the retention time,resolution and number of the theoretical thermal plates.And then,the microfabricated gas chromatographic separation columns made by nickel,polymer and PECVD film substrates are introduced. |
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| Keywords: | gas chromatography separation column micro-electromechanical system(MEMS) gas sensor retention time |
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