非理想软X射线光学多层膜的掠入射镜向反射率

对实际软X射线光学多层膜中普遍存在的主要非理想因素（层厚漂移、界面粗糙度和界面扩散）进行了定理描述，基于动力学光学理论，计算了上述非理想因素对软X射线光学多层膜的掠入射镜向反射率的影响。结果表明：层厚的随机漂移使反射率、尤其是高级反射率降低；累积层厚漂移破坏了多层膜的长程有序性，使反射峰展宽；界面扩散和界面粗糙度使反射率降低，对高级反射率的影响更甚，但二者并不破坏多层膜的长程有序性，所以反射峰的宽度不变；界面扩散和界面粗糙度对反射率影响的机制不同；在界面扩散宽度和界面粗糙度相等的情况下，界面粗糙度使反射率下降显著，用模拟退火Monte-Carlo方法对Co/C软X射线光学多层膜进行了结构评价。该方法避免复杂的求导运算，在软X射线光学多层膜的结构评价中具有较强的实用性。

GRAZING SPECULAR REFLECTIVITY OF NON-IDEAL SOFT X-RAY OPTICAL MULTILAYERS

Three main factors, layer thickness fluctuation, interfacial roughness and interdiffusion of non-ideal soft X-ray optical multilayers were characterized quantitatively. The influences of the three non-ideal factors on the grazing specular reflectivity of non-ideal soft X-ray optical multilayers were calculated by using dynamic optical theory. The results indicate that the random layer thickness fluctuations cause a remarkable decrease in the reflectivity, especially for the high-rorder reflections. The cumulative layer thickness fluctuation destroys the long-range order which is conserved in ideal multilayers, and thus increases the peak width. The interdiffusion and interfacial roughness both make the reflectivity decrease, especially the high-order reflectivity. However, they don't destroy the long-range order of the multilayers, and thus keep the peak width unchanged. The mechanisms of the decrease in the reflectivity caused by iaterdiffusion and interfacial roughness are different. For the same interfacial width and interfacial roughness, the latter causes a much stronger decay in the reflectivity. Monte-Carlo simulating annealing approach, which avoid complicated derivation and can always find global minimum, was used to characterize Co/C soft X-ray optical multilayers. The consistent results indicate that Monte-Carlo simulating annealing approach is quite suitable for the structure characterization of soft X-ray optical multilayers.