| 飞秒激光制备CdS薄膜滤波器的研究 |
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| 引用本文： | 童杏林,刘恋,姜德生,刘忠明. 飞秒激光制备CdS薄膜滤波器的研究[J]. 半导体学报, 2007, 28(5): 717-721 |
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| 作者姓名： | 童杏林 刘恋 姜德生 刘忠明 |
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| 作者单位： | 武汉理工大学光纤传感技术与信息处理教育部重点实验室,武汉,430070 |
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| 基金项目： | 中国博士后科学基金，国家自然科学基金 |
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| 摘 要： | 采用脉冲飞秒激光沉积方法,在石英衬底上制备了CdS薄膜滤波器.研究显示衬底温度在100～600℃范围内变化对CdS薄膜衬底的结构及光学特性有重要影响,在450℃的衬底温度下所生长的CdS薄膜具有较好的结构质量,该薄膜在500nm附近具有较陡的吸收带边及良好的光学滤波性能.
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| 关 键 词： | CdS薄膜滤波器 脉冲激光沉积 结构和光学特性 |
| 收稿时间： | 2015-08-18 |
| 修稿时间： | 2006-11-17 |
Fabrication of CdS Thin Film Filter Using Femtosecond Pulsed Laser Deposition |
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| Tong Xinglin, Liu Lian, Jiang Desheng, Liu Zhongming. Fabrication of CdS Thin Film Filter Using Femtosecond Pulsed Laser Deposition[J]. Journal of Semiconductors, 2007, In Press. Tong X L, Liu L, Jiang D S, Liu Z M. Fabrication of CdS Thin Film Filter Using Femtosecond Pulsed Laser Deposition[J]. Chin. J. Semicond., 2007, 28(5): 717.Export: BibTex EndNote |
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| Authors: | Tong Xinglin Liu Lian Jiang Desheng Liu Zhongming |
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| Affiliation: | Key Laboratory of Fiber Optic Sensing Technology and Information Processing of the Ministry of Education,Wuhan University of Technology,Wuhan 430070,China;Key Laboratory of Fiber Optic Sensing Technology and Information Processing of the Ministry of Education,Wuhan University of Technology,Wuhan 430070,China;Key Laboratory of Fiber Optic Sensing Technology and Information Processing of the Ministry of Education,Wuhan University of Technology,Wuhan 430070,China;Key Laboratory of Fiber Optic Sensing Technology and Information Processing of the Ministry of Education,Wuhan University of Technology,Wuhan 430070,China |
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| Abstract: | A CdS thin film filter is grown on quartz substrate using femtosecond pulsed laser deposition.The influence of the substrate temperature on the structural and optical characteristics of CdS thin films is systematically studied in the range of 100~600℃.The results show that the structural quality is excellent for the CdS thin film that was fabricated at the substrate temperature of 450℃.Optical transmission shows that the CdS thin films possess a steep absorption edge,resulting in a sharp transition between absorbed and transmitted wavelengths,which can be used as an optical filter. |
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| Keywords: | CdS thin film filter femtosecond pulse laser deposition structural and optical characteristic |
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