| 激光全息法制备二维硅基图形衬底 |
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| 引用本文： | 王钰,周志文,李成,陈松岩,赖虹凯. 激光全息法制备二维硅基图形衬底[J]. 半导体学报, 2007, 28(5): 774-777 |
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| 作者姓名： | 王钰 周志文 李成 陈松岩 赖虹凯 |
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| 作者单位： | 厦门大学物理系,半导体光子学研究中心,厦门,361005 |
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| 基金项目： | 国家自然科学基金，福建省人才创新基金，福建省工业科技重点项目 |
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| 摘 要： | 理论上模拟了全息光刻法制备二维硅基图形阵列的光强分布和显影过程,通过改变激光波长及入射光与样品表面的夹角即可得到不同周期的二维图形.在此基础上,采用三束光一次曝光和湿法腐蚀图形转移技术,在n型(100)硅衬底上制备出了周期在亚微米量级的均匀二维图形阵列.该方法适合大面积硅基图形阵列的制作.
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| 关 键 词： | 全息光刻法 硅基 图形衬底 |
| 收稿时间： | 2015-08-18 |
| 修稿时间： | 2007-01-15 |
Preparation of Two-Dimensional Patterned Silicon Substrate by Holographic Lithography |
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| Wang Yu, Zhou Zhiwen, Li Cheng, Chen Songyan, Lai Hongkai. Preparation of Two-Dimensional Patterned Silicon Substrate by Holographic Lithography[J]. Journal of Semiconductors, 2007, In Press. Wang Y, Zhou Z W, Li C, Chen S Y, Lai H K. Preparation of Two-Dimensional Patterned Silicon Substrate by Holographic Lithography[J]. Chin. J. Semicond., 2007, 28(5): 774.Export: BibTex EndNote |
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| Authors: | Wang Yu Zhou Zhiwen Li Cheng Chen Songyan Lai Hongkai |
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| Affiliation: | Semiconductor Photonics Research Center,Department of Physics,Xiamen University,Xiamen 361005,China;Semiconductor Photonics Research Center,Department of Physics,Xiamen University,Xiamen 361005,China;Semiconductor Photonics Research Center,Department of Physics,Xiamen University,Xiamen 361005,China;Semiconductor Photonics Research Center,Department of Physics,Xiamen University,Xiamen 361005,China;Semiconductor Photonics Research Center,Department of Physics,Xiamen University,Xiamen 361005,China |
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| Abstract: | The light intensity distribution and development processes during the preparation of two-dimensional patterned silicon substrates by holographic lithography are simulated.Different periods can be achieved by varying the wavelength and the angle between the sample surface and the laser beams.Large-area uniform two-dimensional sub-micrometer patterned n-type doped (100) silicon substrate has been fabricated by single exposure with a triple beam and wet chemical etching.The method is suitable for fabricating array patterns on large silicon substrates. |
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| Keywords: | holographic lithography silicon substrate patterned substrate |
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