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Finite element analysis of PZT tube scanner motion for scanning tunnelling microscopy
Authors:R. G. Carr
Abstract:This article is a presentation of the results of a finite element method analysis of piezoelectric tube scanners of the type presently in wide use in scanning tunnelling microscopes. The tube scanner moves a tunnelling tip by bending sideways when unsymmetrical voltages are applied to longitudinal stripes of metallization on its walls. It also can be extended and contracted in length by application of symmetrical voltages. One wishes to know the characteristics and magnitudes of the resulting three-dimensional motion. We divided a model tube into radially polarized elements, and constructed a computer program to perform electromechanical stress calculations. The results show the dependence of motion upon applied voltage, tube material, and tube dimensions.
Keywords:Scanning tunnelling microscopy  piezoelectric materials  finite element method
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