| Abstract: | A clean Si(111) flat surface was irradiated by pulsed Nd-YAG laser beams. STM observation of the irradiated surfaces indicates that the laser irradiation generates two kinds of corrugations: rounded hills 100 Å high and 600 Å wide and small spikes 20 Å high and 35 Å wide. The corrugations grew and spread with repeated irradiation and increased laser power. The heating of the irradiated surface at 1200°C for 5 s smoothed the surface atomically, but no ordered structure was observed, possibly due to the covering contaminants released from the surfaces surrounding the specimen by laser irradiation and heating. |
