| 针孔缺陷对集成电路功能成品率影响分析与仿真 |
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| 引用本文： | 马佩军,郝跃,刘红侠.针孔缺陷对集成电路功能成品率影响分析与仿真[J].半导体学报,2001,22(1). |
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| 作者姓名： | 马佩军 郝跃 刘红侠 |
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| 作者单位： | 西安电子科技大学微电子所 |
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| 摘 要： | 对集成电路针孔缺陷引起功能成品率下降的模型进行了研究，给出了分析和仿真针孔功能成品率的两种计算方法——Monte-Carlo方法和关键面积提取方法，这对集成电路成品率设计和分析是非常重要的.
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| 关 键 词： | 集成电路 Monte-Carlo方法 仿真 |
Analysis and Simulation of Effect of Pinhole Defects on Integrated Circuits Functional Yield |
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| Ma Pei-jun,HAO Yue,LIU Hong-xia.Analysis and Simulation of Effect of Pinhole Defects on Integrated Circuits Functional Yield[J].Chinese Journal of Semiconductors,2001,22(1). |
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| Authors: | Ma Pei-jun HAO Yue LIU Hong-xia |
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| Abstract: | Modelling the functional yield loss of integrated circuits caused by pinhole defects is under study on the basis of Monte-Carlo statistical method and critical area algorithm,which are presented for the simulation of the functional yield determined by pinhole defects,as is of great importance in yield-improvement design. |
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