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Realization and simulation of wall shear stress integrated sensors
Authors:Delphine Meunier  Sedat Tardu  Dimitrios Tsamados  Jumana Boussey
Affiliation:

a Institut de Microélectronique, Electromagnétisme et Photonique, IMEP, ENSERG, 23 rue des Martyrs, 38016, Grenoble Cédex, France

b Laboratoire des Ecoulements Géophysiques et Industriels, LEGI, INPG-UJF-CNRS, B.P. 53 X, 38402, Grenoble Cédex, France

Abstract:In this paper we present the impact of hot wire geometry and fluid characteristics on the efficiency of a hot wire to be used as a wall shear stress sensor. Finite differences and finite elements modelling based simulators were used in order to evaluate the thermal performances of hot wire wall shear stress sensor. Several structures were explored including simple conductor or suspended above a cavity (free and sealed with an oxide membrane). It is found out that wire length, wire section and the dimensions of the micro-cavity lying below the hot wire are of fundamental importance on the thermal exchanges occurring between the hot wire and the fluid.
Keywords:MEMS  Wall hot film and pressure micro-sensors  Micro-wire over cavity  Numerical simulation  Heat transfer
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