Optical MEMS devices based on moving waveguides |
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| Authors: | Ollier E |
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| Affiliation: | Lab d'Electron. et de Technol. de l'Inf., CEA, Centre d'Etudes Nucleaires de Grenoble; |
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| Abstract: | The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and optical scanner |
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