有限元法在表面波等离子体中的数值模拟应用

工业用平板型表面波等离子体（SWP）源具有大面积、高密度、高活性等优良性能,其建造之前必须进行结构优化,而对表面电磁波的数值模拟,可以辅助其优化设计。基于有限元法（FEM）,采用AnsoftHFSS模拟软件,数值仿真了大面积矩形SWP源的电磁场空间分布。研究了开槽天线激发表面波场的特性,得出了表面波场的空间分布,与理论分析和实验结果进行了对比,解释了表面波放电的实验现象。研究结果表明在石英-等离子体界面有表面电磁波存在,且分布均匀。研究成果为大面积高效等离子体工艺的产业应用提供建议,也为下一代超大面积SWP源的成功建造提供了有益借鉴。

Numerical Simulation Application of Finite Element Method in Surface-wave Plasmas

Industrial planar-type surface wave plasma（SWP） source has good performances such as large-area,overdense,high-activity and so on,which must be optimized in structure before its construction and numeric simulation of surface electromagnetic wave can assist in its optimized design.Based on finite element method（FEM）,spatial electromagnetic field distribution in a large-area rectangular SWP source was numerically simulated by using simulation software Ansoft HFSS.The character of surface wave excited by slot antennas was studied.Spatial distribution of the surface wave field was obtained.By comparison between theoretical analysis and experiment results,experimental phenomenon of surface-wave discharge was explained.The study results showed that surface electromagnetic waves exist at quartz-plasma interface and the surface waves distributes uniformly.The research results provide suggestions for industrial application of large-area efficient plasma technology and a useful reference to construction of new generation of super large-area SWP source.