离子渗氮用气对后续磁控溅射镀层性能的影响

以40Cr钢为基体材料,进行离子氮化和闭合场非平衡磁控溅射PVD复合表面处理工艺试验。重点探讨用氮、氢混合气体及工业用氨进行离子氮化所得到的白亮层对后续PVD镀层性能的影响。测试了镀层厚度、膜基结合力及摩擦学性能。结果显示,不同渗氮气体得到的复合镀层临界划痕载荷均大于60 N,洛氏压坑边缘均无剥落,但氨处理的压坑边缘有少量坍塌并出现裂纹,表明其白亮层存在缺陷,在球坑试验的试样上也直接观察到缺陷的存在。存在缺陷的白亮层断裂韧性低,压坑试验时,缺陷处启动裂纹并扩展,导致化合物层和PVD镀层的剥落。销盘磨损试验结果表明,用氮和氢混合气体氮化后镀CrTiA lN具有更好的综合摩擦学性能。

Effect of Plasma Nitriding Gas on the Subsequent Magnetron Sputtered Coatings

A complex surface treatment with plasma nitriding and closed field unbalanced magnetron sputtering PVD coating was applied on a medium carbon steel 40Cr.The industrial ammonia and the mixture of nitrogen and hydrogen were used as reaction gases for nitriding.It's emphasized to study the effects of different nitride compounds produced by different gases on the subsequent PVD coatings.Coating thickness,bonding strength and tribological aspects were tested.Experimental results show that the critical loads of s...