Fabrication of PRTs and analysis of characteristics |
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Authors: | Noh SS Lim CS Chung GS Kim KH |
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Affiliation: | Res. Inst., Daeyang Instrum. Co., Pusan, South Korea; |
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Abstract: | Platinum thin films have been prepared on Al/sub 2/O/sub 3/ substrates by DC magnetron sputtering. Platinum resistance thermometers have been fabricated and their characteristics analysed. We used a UV laser (wavelength 355 nm) to adjust the Pt thin films temperature sensors to 100 /spl Omega/ at 0/spl deg/C. As result of setting the Pt resistors to the target value of 109.73 /spl Omega/ at 25/spl deg/C, 82.3% of total resistors had a tolerance within /spl plusmn/0.03 /spl Omega/ and 17.7% were within /spl plusmn/0.06 /spl Omega/ of A-class tolerance according to DIN EN 60751. The PRTs which were fabricated in this research had excellent characteristics such as high accuracy, long-term stability, wide temperature range, good linearity, good repeatability and rapid response time. |
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