| 超薄阳极氧化铝模版的制备 |
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| 引用本文： | 胡迪,白安琪,成步文,王启明. 超薄阳极氧化铝模版的制备[J]. 微细加工技术, 2008, 0(5) |
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| 作者姓名： | 胡迪 白安琪 成步文 王启明 |
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| 作者单位： | 中国科学院半导体研究所集成光电子国家重点实验室,北京,100083 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) ， 国家高技术研究发展计划(863计划) ， 国家自然科学基金 |
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| 摘 要： | 采用二次阳极氧化铝的方法制备出厚度仅为509 nm超薄多孔阳极氧化铝模版,氧化铝模版上孔洞大小均匀.呈完美的六角分布,孔径为35 nm左右,孔间距约为100 nm.成功地将多孔阳极氧化铝模版转移到硅衬底上,并在磷酸溶液中通孔,使薄膜上小孔双向贯通.可以十分方便的利用该模版合成纳米点、纳米柱等纳米结构.
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| 关 键 词： | 阳极氧化铝 超薄 纳米结构 |
Fabrication of Ultra-thin Porous Anodic Alumina Films |
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| HU Di,BAI Anqi,CHENG Buwen,WANG Qiming. Fabrication of Ultra-thin Porous Anodic Alumina Films[J]. Microfabrication Technology, 2008, 0(5) |
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| Authors: | HU Di BAI Anqi CHENG Buwen WANG Qiming |
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| Affiliation: | HU Di,BAI An-qi,CHENG Bu-wen,WANG Qi-ming(State Key Laboratory on Integrated Optoelectronics,Institute ofSemiconductors,Chinese Academy of Science,Beijing 100083,China) |
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| Abstract: | Ultra-thin porous anodic alumina templates have a broad prospect in different synthetic nano-structure system.We have prepared ultra-thin porous anodic alumina films by the method of two-step anodizing.The thickness of the film is only 509 nm,holes show perfect hexagonal distribution with uniform size and regular shape,whose diameters are around 35 nm and space betweens are about 100 nm.Porous anodic alumina films were successfully transplanted onto silicon substrate and two-way through holes were produced ... |
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| Keywords: | anodic alumina ultra-thin nano-structure |
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