等离子浸没离子注入沉积纳米TiN薄膜的机械性能研究

采用等离子体浸没离子注入沉积(PⅢ-D)在不锈钢基底上合成TiN薄膜。对沉积TiN薄膜后的不锈钢试样进行拉伸变形实验,扫描电子显微镜(SEM)原位观察表明在较大塑性变形量下氮化钛薄膜没有剥落和裂纹出现。采用划痕法测得薄膜与基体间有较强的结合力。薄膜的纳米压痕测试显示出很高的纳米硬度和弹性模量值。通过对合成TiN薄膜的TEM结构测试、AFM表面观察、AES成分结果分析,认为该合成薄膜的纳米级晶粒尺寸、致密的表面质量以及成分沿深度的分布是其具有优异的抗塑性变形性能以及高的结合强度的原因。

Mechanical Properties of TiN Nano-film Deposited by Plasma Immersion Ion Implantation and Deposition

Nano-structured TiN films were synthesized on stainless steel by using plasma immersion ion implantation and deposition (PIII-D), developed in this decade and considered as a advanced surface modification method. Samples deposited with TiN film were undertaken a tension test and observed in situ by scanning electron microscope. It shows that there is no delamination, peeling or cracking existing on the film after relative highly plastic deformation. Scratch test was chosen to measure the adhesion strength between the film and matrix, and a very high value was obtained. Nano-indentation tests for the synthesized TiN film shows that it possesses very high nano-hardness and young’s modulus. Transmission electron microscopy was used to identify the structure of the prepared film, atom force microscopy to observe the surface morphology, and Auger electron spectroscope to detect the composition profile in depth. It is considered that the excellent mechanical properties of the synthesized TiN film are attributed to the nanocrystal structure of the film, high density, excellent surface quality as well as a broader film/matrix interface achieved by PIII-D process.