Precision tracking control of a piezoelectric-actuated system |
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Authors: | Jing-Chung Shen Wen-Yuh Jywe Huan-Keng Chiang Yu-Ling Shu |
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Affiliation: | aDepartment of Automation Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan, ROC;bDepartment of Electrical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin, Taiwan, ROC |
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Abstract: | In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl–Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. |
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Keywords: | Piezoelectric actuator Nano-positioning Sliding-mode control Tracking control |
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