| 基于MEMS的V型梁结构设计和性能测试 |
| |
| 引用本文： | 陈林林,李伟,张玉华. 基于MEMS的V型梁结构设计和性能测试[J]. 仪表技术与传感器, 2022, 0(2): 7-10,51 |
| |
| 作者姓名： | 陈林林 李伟 张玉华 |
| |
| 作者单位： | 郑州科技学院机械工程学院 |
| |
| 基金项目： | 河南省高等学校重点科研项目计划(22A460031);2020年度河南省教育厅高校重点研究项目(20B460016)。 |
| |
| 摘 要： | 为了研究不同弯曲曲率对V型梁结构具有不同的影响,提出了以LCP柔性材料为衬底的V型梁弯曲的力学模型,并通过软件仿真和实验验证了弯曲曲率对柔性V型梁器件的影响.从对比结果可得,当柔性衬底的曲率从0逐渐增大到33.3 m-1时,V型梁的驱动电流也随之增大,实测值与仿真值的最大误差低于6.0％,很好地揭示了柔性衬底弯曲曲率对...
|
| 关 键 词： | MEMS 弯曲曲率 柔性衬底 V型梁结构 力学特性 |
Design and Performance Test of V-beam Structure Based on MEMS |
| |
| CHEN Lin-lin,LI Wei,ZHANG Yu-hua. Design and Performance Test of V-beam Structure Based on MEMS[J]. Instrument Technique and Sensor, 2022, 0(2): 7-10,51 |
| |
| Authors: | CHEN Lin-lin LI Wei ZHANG Yu-hua |
| |
| Affiliation: | (School of Mechanical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China) |
| |
| Abstract: | In order to study the effect of different curvature on V-beam structure,a mechanical model of V-beam bending based on LCP flexible material was proposed,and the influence of curvature on flexible V-beam device was verified by software simulation and experiment.The results show that when the curvature of the flexible substrate increases from 0 to 33.3 m-1,the driving current of the V-beam increases,and the maximum error between the measured value and the simulation value is less than 6.0%,which well reveals the influence of the curvature of the flexible substrate on the driving performance of the V-beam structure. |
| |
| Keywords: | MEMS bending curvature flexible substrate V-beam structure mechanical properties |
| 本文献已被 维普 等数据库收录！ |
|
