新型高温压力传感器的设计与性能测试

针对高温恶劣环境下对压力参数的测试需求,以单晶蓝宝石为原材料,对无线无源蓝宝石高温压力传感器进行了设计、工艺加工及性能测试.以压力膜片敏感原理为主要根据,结合不同的信号传输与提取方式,首先对LC谐振式的无线无源蓝宝石高温压力传感器进行了设计,然后通过蓝宝石刻蚀、蓝宝石减薄、直接键合等3个关键工艺实现了蓝宝石密封压力腔的...

Design and Performance Test of New High Temperature Pressure Sensor

According to the requirement of pressure parameter test in high temperature and harsh environment,the design,processing and performance test of wireless passive sapphire high temperature pressure sensor were carried out with single crystal sapphire as raw material.Based on the principle of pressure diaphragm sensitivity,combined with different signal transmission and extraction methods,firstly,LC resonant wireless passive sapphire high temperature pressure sensor was designed,and then sapphire sealed pressure chamber was prepared by three key technologies,sapphire etching,sapphire thinning,direct bonding,etc.,and capacitor plate was realized by screen printing.The metallization integration of inductance coil and base was realized.Finally,the performance of the wireless passive sapphire high temperature pressure sensor was tested in high temperature environment by the high temperature pressure composite test system.The test results show that the high temperature pressure sensor can achieve the pressure test in the range of 60~210 kPa at 800℃.At 800℃,the sensitivity and zero temperature drift coefficient of the sensor can reach 10.377 kHz/kPa and 0.0296 MHz/℃.