Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm |
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| Authors: | Kim Tae San Lee Jong Wook Lee Won Kyung Sohn So Young |
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| Affiliation: | 1.Department of Industrial Engineering, Yonsei University, 134 Shinchon-dong, Seoul, 120-749, Republic of Korea
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| Abstract: | Journal of Intelligent Manufacturing - In semiconductor manufacturing, detecting defect patterns is important because they are directly related to the root causes of failures in the wafer process.... |
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