| 等离子体聚合工艺对聚合沉积速率的影响 |
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| 引用本文： | 潘长江,黄楠,刘睿睿,王进,孙鸿.等离子体聚合工艺对聚合沉积速率的影响[J].真空科学与技术学报,2004,24(6):455-458. |
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| 作者姓名： | 潘长江 黄楠 刘睿睿 王进 孙鸿 |
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| 作者单位： | 西南交通大学生物材料与表面工程研究所,成都,610031 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，国家自然科学基金，西南交通大学校科研和教改项目 |
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| 摘 要： | 利用等离子体聚合的方法对两种有机单体(正丙醇和丙烯醇)进行了等离子体聚合,成功地在Si基体上沉积了高分子薄膜.利用XPS研究了薄膜的结构和不同工艺对沉积速度的影响.研究表明,随着功率的增加或工作气压的增加,沉积速率增加;偏压的增加使等离子体聚合的沉积速率减小.研究还发现,丙烯醇含有双键结构,其沉积速率比正丙醇大.
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| 关 键 词： | 等离子体聚合工艺 正丙醇 丙烯醇 沉积速率 |
| 文章编号： | 1672-7126(2004)06-0455-04 |
| 修稿时间： | 2002年3月15日 |
Influence of Plasma Polymerization on Polymer Deposition Rate |
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| Pan Changjiang,Huang Nan,Liu Ruirui,Wang Jin and Sun Hong.Influence of Plasma Polymerization on Polymer Deposition Rate[J].JOurnal of Vacuum Science and Technology,2004,24(6):455-458. |
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| Authors: | Pan Changjiang Huang Nan Liu Ruirui Wang Jin and Sun Hong |
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| Affiliation: | Pan Changjiang,Huang Nan*,Liu Ruirui,Wang Jin and Sun Hong |
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| Abstract: | l-propanol and allyl alcohol were polymerized and deposited on silicon substrat es by radio-frequency (RF) discharge plasma polymerization.Its structures were characterized with X-ray diffraction (XRD) and X-ray photoelectron spectroscop y (XPS).Influence of plasma polymerization on polymer deposition rate was also s tudied.The results show that the deposition rate increases with the increase of the plasma power and partial pressure of the organic materials,but decreases wit h the rise of bias voltages.In addition,the deposition rate of allyl alcohol pol ymer is higher than that of l-propanol possibly because allyl alcohol monomer h as double bonds |
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| Keywords: | Plasma polymerization l-propanol Allyl alcohol Deposition rate |
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