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Study of diamond-like carbon films on LiNbO3 |
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| Authors: | Qing Zhang S F Yoon S Zhgoon Bo Gan J Ahn A Revkov Rusli |
| Affiliation: | a Microelectronics Center, Nanyang Technological University, Singapore b Moscow Power Engineering Institute, Moscow, Russia |
| Abstract: | Diamond-like carbon (DLC) films have been successfully deposited on Y-cut LiNbO3 substrates using the plasma enhanced CVD technique. A thin interlayer of SiC between the DLC films and the LiNbO3 is necessary to ensure a good adhesion of the DLC films to the LiNbO3 substrate. The physical properties and structural network of the DLC films have been investigated in detail. It is observed that the film hardness is increased with increasing the film thickness, as is the adhesion of the DLC films to the LiNbO3 substrates. The effect of accelerating surface acoustic wave by the DLC films has been confirmed. |
| Keywords: | Carbon Diamond-like carbon films Surface acoustic wave Fourier transform infrared spectroscopy Silicon carbide |
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