| 金钢石膜表面抛光与平整技术进展 |
| |
| 引用本文： | 万静,苟立,冉均国.金钢石膜表面抛光与平整技术进展[J].现代技术陶瓷,2003,24(1):31-34. |
| |
| 作者姓名： | 万静 苟立 冉均国 |
| |
| 作者单位： | 四川大学无机材料系,成都,610065 |
| |
| 基金项目： | 国家自然科学基金资助课题 (698760 2 6) |
| |
| 摘 要： | 综述了金刚石膜抛光与平整技术，例如研磨、热化学抛光、离子束抛光、化学机械抛光、等离子抛光、激光抛光等方法的优点与不足，重点分析厚度较小（约几微米）的金刚石薄膜抛光与平整的可行途径。
|
| 关 键 词： | 金钢石膜 表面抛光 平整 技术进展 |
Progress in Polishing and Planarizing of Diamond Film |
| |
| Wan Jing,Gou Li,Ran Junguo.Progress in Polishing and Planarizing of Diamond Film[J].Advanced Ceramics,2003,24(1):31-34. |
| |
| Authors: | Wan Jing Gou Li Ran Junguo |
| |
| Abstract: | The advantages and disadvantages were summarized with respect to polishing and planarizing techniques of diamond film,such as mechanical,thermochemical,ion beam,chemical mechanical,plasma,laser methods.The practical approaches for polishing diamond thin film were emphasized in the present paper. |
| |
| Keywords: | diamond film polishing planarizing |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
