| 基于白光的双波长相移干涉的误差分析 |
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| 引用本文： | 周明宝,林大键,郭履容,郭永康.基于白光的双波长相移干涉的误差分析[J].光学精密工程,1999,7(5):106-113. |
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| 作者姓名： | 周明宝 林大键 郭履容 郭永康 |
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| 作者单位： | 1. 中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都,610209
2. 四川联合大学物理系,成都610041 |
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| 摘 要： | 概略介绍了基于白光的双波长相移干涉表面形貌测量系统的原理,具体分析了影响测量精度的各种误差因素,给出了相应的误差计算公式和计算结果,并用模拟测量结果和实际测量结果进行了验证和比较。
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| 关 键 词： | 相移干涉 表面形貌 测量 测量精度 |
| 收稿时间： | 1998-10-22 |
| 修稿时间： | 1999-02-03 |
Error Analysis on Two-wavelength White-light Phase-shifting interferometry |
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| ZHOU Ming-Bao,LIN Da-Jian,GUO Lu-Rong,GUO Yong-Kang.Error Analysis on Two-wavelength White-light Phase-shifting interferometry[J].Optics and Precision Engineering,1999,7(5):106-113. |
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| Authors: | ZHOU Ming-Bao LIN Da-Jian GUO Lu-Rong GUO Yong-Kang |
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| Affiliation: | 1. State Lab of Optical Technologies on Microfabrication, Institute of Optics &; Electronics, Chinese Academy of Sciences, Chengdu 610209;2. Physics Department, Sichuan University, Chengdu 610041 |
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| Abstract: | The theory of the two wavelength white light phase shifting topography measuring system is described in brief. Many sources that lead to measuring errors are analyzed, and the relative error calculating formulas and results are given. Their validity is verified by comparison with the simulated result and the measured result. |
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| Keywords: | Two wavelength phase shifting interferometry Topography Measurement Accuracy |
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