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| 增强双光子微细加工分辨率的新技术 | |
| 引用本文： | 韦晓全,李艳秋,高国华,朱煜,马竞.增强双光子微细加工分辨率的新技术[J].微细加工技术,2008(5). |
| 作者姓名： | 韦晓全 李艳秋 高国华 朱煜 马竞 |
| 作者单位： | 1. 中国科学院电工研究所,北京,100190;中国科学院研究生院,北京,100190 2. 中国科学院电工研究所,北京,100190;北京理工大学,北京,100080 3. 清华大学精密仪器与机械学系,北京,100084 |
| 基金项目： | 国家重点基础研究发展计划(973计划) |
| 摘 要： | 通过对双光子微细加工的原理分析,探讨了双光子加工中可能影响最终分辨率的各个因素,在所建立的分辨率理论模型指导下,研究了通过优化工艺参数实现双光子微细加工分辨率增强的方法,并进一步提出了使用衍射光学器件改变激励光波面分布以实现加工分辨率增强的方案.针对衍射光学器件方案进行了基于矢量衍射理论的具体设计和初步实验验证. |
| 关 键 词： | 双光子加工 分辨率增强 衍射光学器件 |
Enhancing the Resolution of Two-photon Microfabrication |
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| WEI Xiaoquan,LI Yanqiu,GAO Guohua,ZHU yu,MA Jing.Enhancing the Resolution of Two-photon Microfabrication[J].Microfabrication Technology,2008(5). | |
| Authors: | WEI Xiaoquan LI Yanqiu GAO Guohua ZHU yu MA Jing |
| Affiliation: | WEI Xiao-quan1,LI Yan-qiu1,2,GAO Guo-hua3,ZHU Yu3,MA Jing3(1.Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China,2.Beijing Institute of Technology,Beijing 100080,3.Department of Precision Instrument & Mechanology,TsinghuaUniversity,Beijing 100084,4.Graduate School of the Chinese Academy of Sciences,China) |
| Abstract: | Upgrading the system resolution power is one of the most importance things in two-photon micro-fabrication research.According to the theory on two-photon micro-fabrication,we are able to reveal the relation between the and resolution of fabrication system.Then,the method to enhance the resolution of two-photon fabrication by optimizing the techniques characters is discussed,accompanied with the experimental support.Next,the proposal that using the diffractive optical element to modulate the wave front distr... |
| Keywords: | two-photon micro-fabrication resolution enhancement |
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