| 扫描电镜用图像采集系统的设计 |
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| 引用本文： | 束娜 方光荣 姜楠. 扫描电镜用图像采集系统的设计[J]. 微细加工技术, 2005, 0(3): 9-13 |
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| 作者姓名： | 束娜 方光荣 姜楠 |
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| 作者单位： | [1]中国科学院电工研究所,北京,100080 [2]中国科学院研究生院,北京,100039 |
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| 摘 要： | 介绍了一种用FPGA（现场可编程门阵列）技术设计的新型图像采集系统,该系统可用于改进图像采集功能欠缺的老型号扫描电镜.设计方案采用可编程芯片FP-GA对系统进行逻辑控制,编写不同的程序即可广泛应用于其他图像的采集.选用TI公司的ADSl606作为模数转换的核心芯片,介绍了ADSl606的输入驱动电路、参考源电路以及为其设计的仪表放大调整电路,并给出了FPGA的控制工作流程和用Verilog HDL（硬件描述语言）编写的部分程序.同时,还对电路设计的注意事项做了详细的说明.
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| 关 键 词： | 扫描电镜 图像采集 FPGA Verilog HDL |
| 文章编号： | 1003-8213（2005）03-0009-05 |
| 收稿时间： | 2005-03-12 |
| 修稿时间： | 2005-03-122005-04-22 |
Design of Image Sampling System Used in SEM |
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| SHU Na,FANG Guang-rong, JIANG Nan. Design of Image Sampling System Used in SEM[J]. Microfabrication Technology, 2005, 0(3): 9-13 |
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| Authors: | SHU Na FANG Guang-rong JIANG Nan |
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| Affiliation: | 1. Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China; 2. Graduate School of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | A new image sampling system with FPGA is designed to improve the data sampling part of the old model SEM(scanning electron microscope).The design performes the logical control of the system by using FPGA.It used ADS1606 of TI Corp.as the analog-digital converter chip.The instrument amplifier,driving circuit and reference sources circuit are suitably designed according to the imaging signal.The control process of FPGA and some program edited with Verilog HDL are presented.Also,some considerations of the circuit designing is emphasized. |
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| Keywords: | SEM(scanning electron microscope) image sampling FPGA Verilog HDL |
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