| 用X射线应力仪无损检测薄膜材料厚度 |
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| 引用本文： | 姜传海,叶长青,周健威,吴建生.用X射线应力仪无损检测薄膜材料厚度[J].无损检测,2004,26(2):74-76. |
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| 作者姓名： | 姜传海 叶长青 周健威 吴建生 |
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| 作者单位： | 上海交通大学,教育部高温材料及高温测试重点实验室,上海,200030 |
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| 摘 要： | 基于X射线衍射与吸收理论,提出一种薄膜厚度测量方法即膜下基体衍射法。利用X射线应力仪测量高速钢表面的TiN薄膜厚度,发现利用膜下基体衍射可精确测量薄膜厚度。
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| 关 键 词： | 射线检验 薄膜材料 X射线衍射 厚度测量 |
| 文章编号： | 1000-6656(2004)02-0074-03 |
| 修稿时间： | 2002年12月4日 |
NONDESTRUCTIVE MEASUREMENT OF THE THICKNESS OF FILM MATERIAL BY X-RAY ANALYZER |
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| JIANG Chuan-hai,YE Chang-qing,ZHOU Jiand Tests of Ministry of Education,Shanghai Jiaotong University,Shanghai ,China.NONDESTRUCTIVE MEASUREMENT OF THE THICKNESS OF FILM MATERIAL BY X-RAY ANALYZER[J].Nondestructive Testing,2004,26(2):74-76. |
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| Authors: | JIANG Chuan-hai YE Chang-qing ZHOU Jiand Tests of Ministry of Education Shanghai Jiaotong University Shanghai China |
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| Affiliation: | JIANG Chuan-hai,YE Chang-qing,ZHOU Jiand Tests of Ministry of Education,Shanghai Jiaotong University,Shanghai 200030,China) |
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| Abstract: | Based on the theory of X-ray diffraction and absorption, a method for measuring the thickness of film material according to the diffraction intensity of the matrix below film was established. The thickness of the TiN film on high-speed steel was measured by X-ray analyzer. It was found that the film thickness could be measured accurately by using the method. |
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| Keywords: | Radiographic testing Film material X-ray diffraction Thickness measurement |
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