| 双牺牲层微测辐射热计最新研究进展 |
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| 引用本文： | 彭自求,王军,袁凯,蒋亚东.双牺牲层微测辐射热计最新研究进展[J].电子器件,2010,33(3):303-307. |
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| 作者姓名： | 彭自求 王军 袁凯 蒋亚东 |
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| 作者单位： | 电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,成都,610054 |
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| 基金项目： | 电子薄膜与集成器件国家重点实验室开放基金资助 |
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| 摘 要： | 通过改善结构,来研制更小尺寸、更高分辨率的器件,成为微测辐射热计研制的新趋势,而其中最普遍的做法就是使用双牺牲层.本文介绍了双牺牲层微测辐射热计研究的最新成果,即以Raytheon和DRS等为代表的两种做法,并从器件结构和工艺上比较了两种思路的优劣.
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| 关 键 词： | 微测辐射热计 双牺牲层 屋檐结构 伞状结构 隐藏桥腿结构 |
Recent developments of micro-bolometer using double sacrificial layers |
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| PENG Ziqiu,WANG Jun,YUAN Kai,JIANG Yadong.Recent developments of micro-bolometer using double sacrificial layers[J].Journal of Electron Devices,2010,33(3):303-307. |
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| Authors: | PENG Ziqiu WANG Jun YUAN Kai JIANG Yadong |
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| Affiliation: | PENG Ziqiu,WANG Jun,YUAN Kai,JIANG Yadong(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Scienceand Technology of China(UESTC),Chengdu 610054,China) |
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| Abstract: | In order to develop high resolution uncooled infrared microbolometer with smaller pixel size,cell structure with double sacrificial layers is a new trend and the most common way for microbolometers.This article described the recent research results of microbolometer using double-sacrificial layer in Raytheon company and DRS company,also compare the structure and fabricating process of two kinds of designs were compared. |
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| Keywords: | microbolometer double sacrificial layers eave structure umbrella structure hidden leg structure |
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